alternative substrate
1.Ti B N films were synthesized by alternative deposition of Ti and h BN through substrate rotation in multi target magnetron sputtering system The microstructure and mechanical properties of films were studied by XRD, TEM and microindentor It is shown that deposited Ti B N films exists as amorphous Ti(N,B) compound and the hardness reaches HK2470 After crystallization, Ti B N films consist of Ti(N, B)crystal existed in TiN like structure and the hardness decreases a little
