charging inductance
1.The experimental results indicate that the smaller the stored energy, the higher gas pressure, and the more channel number, the more channel resistor, inductance, and efficiency of the pumping source. The deposited efficiency of 94% is obtained with the capacitor of 0. 5μF, the charging voltage of -20kV, and the pressure of 0. 1MPa in the case of V(N2):V(Ar)=3:7.
