6.Two-step an n ealing is favorable to diminish the point defects introduced by ion-implantatio n ,and there exists the best temperature region for recrystallization during the se cond annealing step.
7.According to the crystallization quality and the concentration distribution of slices annealed under different conditions, the annealing of CdZnTe wafers is classified into three kinds, namely de precipitate annealing, de impurity annealing and homogenizing annealing. The favorable annealing process should be a multi step and multi period procedure.
