find command
4.The Scan Efficiency way is used to reduce implant times and improve product throughput. Scan Efficiency uses a Digital Signal Processor (DSP) to find that wafer edge would out of beam(if dIB/dt = 0; d~2IB/dt~2<0) by provide accurate data collection and realtime analysis. DSP would command robot to change its move direction in order to avoid the wasteful time.
5.During the process of doing graduation design,the authors adopt Multisim 2001 software and MATLAB software to carry on simulation to analyse and research the Cannon Command System,but the results find in surprise there are greater defects of the method for solving this question in existing automatic control theory literatrues.
