interface reaction
3.A STUDY OF Ti/Al_2O_3 INTERFACE REACTION BY AUGER ELECTRON ENERGY SPECTROSCOPY
10.After deposition of a layer of super-thin A film on a clean disordered GaAs surface, the Al/GaAs interface reaction is studied by XPS. The results show that the Al atom can penetrate into GaAs substrate to form AlAs with freed Ga left on GaAs substrate surface by Al-Ga replacement reaction. A Ga/AlAs + GaAs/GaAs three layer model is proposed.

