mirror tilt
1.The lifetime and the estimated shortest actuating time of the torsion mirror actuators can reach 10 8 at least and less than 2ms, respectively. There certainly exist the electrostatic yielding voltages for driving the micro mirrors of the actuators to tilt from 0° to 90° spontaneously, and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° as well.
