moulding board
2.This thesis work has researched the fabrication technics of photonic crystal defect waveguide with air-bridge structure and collecting waveguide; Suggested using UV-lithography and wet etching to fabricate traditional waveguide, after that, using EB-lithography and dry etching to fabricate photonic crystal holes, so can reduce the fabrication cost by a big range; Designed the moulding board, which can fabricate the air-bridge structure and is convenient for recognizing position in EB-lithography; the structure consisted of traditional waveguides and etching grooves are fabricated on SOI successfully, then an successful EB-lithography is realized on the structure, the defect waveguide collected with the traditional waveguide quite well; Used the etching grooves to do the sacrificial layer etching experiment, which grounded etching sacrificial layer by photonic crystal holes in next step.
