silicon gate
6.Secondly, the radiation effects of the system of silicon gate Si/SiO2(silicon gate NMOS and PMOS) implanted BF2 are made a deep systematic study. Especially, the relationship between threshold voltage shift (Vth and Vit Vot) in radiated MOS transistor and irradiation dose rate, irradiation dose, irradiation temperature, bias voltage, device structure as well as annealing condition is explored emphatically.
8.The development of a high-speed and low-power dissipation SOI CMOS fully-depleted integrated circuit with thin silicon film was presented. A fully-depleted SOI structure with thin silicon film, and the techniques, including high-quality oxidation of the gate, LDD structure, sputtered Ti film silicide , etc, were used to implement SOI CMOS laser range finding device with high-speed and low-power dissipation, which is based on the simulation and testing for the device structure.

