vacuum lamp
1.In this paper,we report the result of diamond like carbon films grown at comparatively low substrate temperature(120 ℃) on Si, Mo and glass substrates by direct photo chemical vapor deposition (CVD) technique. In the process,a microwave excited vacuum ultraviolet(VUV) Xe lamp is used as the light source and the mixture of C 2H 2 and Ar is used as reactive gases.
