vapor source
5.Fluorinated amorphous hydrogenated (a-C: F: H) carbon thin films were deposited using radio frequency plasma enhance chemical vapor deposition (RF-PECVD) reactor with CF4 and CH4 as source gases in different RF-power and deposition temperature and they were deal with thermal annealing in a N2 environment.
10.In this paper,we report the result of diamond like carbon films grown at comparatively low substrate temperature(120 ℃) on Si, Mo and glass substrates by direct photo chemical vapor deposition (CVD) technique. In the process,a microwave excited vacuum ultraviolet(VUV) Xe lamp is used as the light source and the mixture of C 2H 2 and Ar is used as reactive gases.

